Gas Detectors for Semiconductor Applications

The following gas detectors have been suggested by manufacturers as being suitable for applications within the semiconductor industry.  Within the manufacturing process in semiconductors suitable detectors may include those for ammonia, chlorine, nitrogen dioxide and nitric oxide.  PH3 detectors may be used as a doping agent in manufacturing, diffusion and ion implementation, chemical vapor deposition and VOC monitors may be used in applications including Lithography, etching, oxidation, metallization, assembly & testing.

We recommend checking your site-specific requirements and carrying out a risk assessment to ensure you choose the correct gas detector for your application.  Should you require assistance with this then please contact our Sales Team on 0141 771 7749 or contact [email protected].

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